IEEE - Institute of Electrical and Electronics Engineers, Inc. - Novel two-stage CMOS-MEMS capacitive-type tactile-sensor with ER-fluid fill-in for sensitivity and sensing range enhancement

2015 Transducers - 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

Author(s): Wei-Cheng Lai ; Weileun Fang
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2015
Conference Location: Anchorage, AK, USA
Conference Date: 21 June 2015
Page(s): 1,175 - 1,178
ISBN (Electronic): 978-1-4799-8955-3
ISSN (Electronic): 2164-1641
DOI: 10.1109/TRANSDUCERS.2015.7181138
Regular:

This study has presented a novel two-stage CMOS-MEMS capacitance-type tactile sensor with ER-fluid fill-in to extend the sensing range. Merits of the sensor are: (1) small tactile force (mN) is... View More

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