IEEE - Institute of Electrical and Electronics Engineers, Inc. - Design and implementation of a fully-decoupled tuning fork (FDTF) MEMS vibratory gyroscope for robustness improvement

2015 Transducers - 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

Author(s): Feng-Yu Lee ; Kai-Chih Liang ; Emerson Cheng ; Weileun Fang
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2015
Conference Location: Anchorage, AK, USA
Conference Date: 21 June 2015
Page(s): 1,160 - 1,163
ISBN (Electronic): 978-1-4799-8955-3
ISSN (Electronic): 2164-1641
DOI: 10.1109/TRANSDUCERS.2015.7181134
Regular:

This study demonstrates the structural design and implementation of a single-axis MEMS vibratory rate gyroscope for the robustness improvement. As in Fig.1, features of this study are: (1) the... View More

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