IEEE - Institute of Electrical and Electronics Engineers, Inc. - A stainless-steel-based capacitive pressure sensor chip and its microwelding integration

2015 Transducers - 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

Author(s): Xing Chen ; Daniel Brox ; Babak Assadsangabi ; Mohamed Sultan Mohamed Ali ; Kenichi Takahata
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2015
Conference Location: Anchorage, AK, USA
Conference Date: 21 June 2015
Page(s): 1,081 - 1,084
ISBN (Electronic): 978-1-4799-8955-3
ISSN (Electronic): 2164-1641
DOI: 10.1109/TRANSDUCERS.2015.7181114
Regular:

A stainless-steel (SS) chip of capacitive pressure sensor and its new integration method are developed. The sensors are microfabricated through thermal bonding of the chip dies made of... View More

Advertisement