IEEE - Institute of Electrical and Electronics Engineers, Inc. - Ultra-high-speed cantilever tactile probe for high-aspect-ratio micro metrology

2015 Transducers - 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

Author(s): H. S. Wasisto ; L. Doering ; U. Brand ; E. Peiner
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2015
Conference Location: Anchorage, AK, USA
Conference Date: 21 June 2015
Page(s): 1,061 - 1,064
ISBN (Electronic): 978-1-4799-8955-3
ISSN (Electronic): 2164-1641
DOI: 10.1109/TRANSDUCERS.2015.7181109
Regular:

A silicon cantilever-based piezoresistive tactile probe coated with an aluminum oxide (Al2O3) thin film in an atomic layer deposition (ALD) process is designed and fabricated... View More

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