IEEE - Institute of Electrical and Electronics Engineers, Inc. - An alternative technique to Perfectly Matched Layers to model anchor losses in MEMS resonators with undercut suspensions

2015 Transducers - 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

Author(s): J. Segovia-Fernandez ; C. Xu ; C. Cassella ; G. Piazza
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2015
Conference Location: Anchorage, AK, USA
Conference Date: 21 June 2015
Page(s): 985 - 988
ISBN (Electronic): 978-1-4799-8955-3
ISSN (Electronic): 2164-1641
DOI: 10.1109/TRANSDUCERS.2015.7181090
Regular:

This paper presents and experimentally validates a new numerical approach to accurately model anchor losses in MEMS resonators with undercut suspensions. This method is an alternative to the use... View More

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