IEEE - Institute of Electrical and Electronics Engineers, Inc. - A comparison between experiments and fem predictions for blowtorch reflow of fused silica micro-shell resonators

2015 Transducers - 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

Author(s): B. Shiari ; A. Darvishian ; T. Nagourney ; J. Cho ; K. Najafi
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2015
Conference Location: Anchorage, AK, USA
Conference Date: 21 June 2015
Page(s): 776 - 779
ISBN (Electronic): 978-1-4799-8955-3
ISSN (Electronic): 2164-1641
DOI: 10.1109/TRANSDUCERS.2015.7181038
Regular:

We report a non-isothermal model and FEM results for prediction of geometries of fused silica micro-shell resonators fabricated by blowtorch molding process. The model is successfully applied to... View More

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