IEEE - Institute of Electrical and Electronics Engineers, Inc. - Piezoelectric micromachined ultrasonic transducer with increased output pressure via concentric venting rings

2015 Transducers - 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

Author(s): Ofer Rozen ; Scott T. Block ; Stefon E. Shelton ; David A. Horsley
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2015
Conference Location: Anchorage, AK, USA
Conference Date: 21 June 2015
Page(s): 670 - 673
ISBN (Electronic): 978-1-4799-8955-3
ISSN (Electronic): 2164-1641
DOI: 10.1109/TRANSDUCERS.2015.7181012
Regular:

In a conventional piezoelectric micromachined ultrasonic transducer (PMUT), only half the acoustic output is used, because pressure emerging from the back of the PMUT is wasted. Here, we... View More

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