IEEE - Institute of Electrical and Electronics Engineers, Inc. - Fabrication of multi-layer windings in silicon-embedded toroidal inductors

2015 Transducers - 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

Author(s): Xuehong Yu ; Mark G. Allen
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2015
Conference Location: Anchorage, AK, USA
Conference Date: 21 June 2015
Page(s): 610 - 613
ISBN (Electronic): 978-1-4799-8955-3
ISSN (Electronic): 2164-1641
DOI: 10.1109/TRANSDUCERS.2015.7180997
Regular:

We report a fabrication method for silicon-embedded toroidal inductors with multi-layer windings, based on 3D shadow mask technology. Such multilayer devices boost inductance density within a... View More

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