IEEE - Institute of Electrical and Electronics Engineers, Inc. - Smart (shrink manufacturing advanced research tools)

2015 Transducers - 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

Author(s): Sophia Lin ; Eugene Lee ; Jonathan Pegan ; Himanshu Sharma ; Michelle Khine
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2015
Conference Location: Anchorage, AK, USA
Conference Date: 21 June 2015
Page(s): 580 - 583
ISBN (Electronic): 978-1-4799-8955-3
ISSN (Electronic): 2164-1641
DOI: 10.1109/TRANSDUCERS.2015.7180990
Regular:

The challenge of micro- and nano-fabrication lies in the difficulties and costs associated with patterning at such high resolution. To make such promising technology - which could enable pervasive... View More

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