IEEE - Institute of Electrical and Electronics Engineers, Inc. - A micro-machined hydrophone using piezoelectricity on gate of a field-effect transistor

2015 Transducers - 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

Author(s): Min Sung ; Kumjae Shin ; Wonkyu Moon
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2015
Conference Location: Anchorage, AK, USA
Conference Date: 21 June 2015
Page(s): 379 - 382
ISBN (Electronic): 978-1-4799-8955-3
ISSN (Electronic): 2164-1641
DOI: 10.1109/TRANSDUCERS.2015.7180940
Regular:

This paper presents the design and fabrication of a miniaturized hydrophone made by applying the electric field of a micro-sized piezoelectric body directly on the gate of a field-effect... View More

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