IEEE - Institute of Electrical and Electronics Engineers, Inc. - Large stroke electrostatic actuated PDMS-on-silicon micro-pump

2015 Transducers - 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

Author(s): J. Gao ; D. Guo ; S. Santhanam ; G. K. Fedder
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2015
Conference Location: Anchorage, AK, USA
Conference Date: 21 June 2015
Page(s): 117 - 120
ISBN (Electronic): 978-1-4799-8955-3
ISSN (Electronic): 2164-1641
DOI: 10.1109/TRANSDUCERS.2015.7180875
Regular:

We introduce a large stroke electrostatic micro-pump made with a thin PDMS diaphragm embedded with thin-film metal electrodes and bonded over a smoothly shaped Si substrate that acts as the... View More

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