IEEE - Institute of Electrical and Electronics Engineers, Inc. - A 2.47 GHz ultra NanoCrystaline diamond disk resonator with temperature compensation for RF application

2015 19th International Symposium on VLSI Design and Test (VDAT)

Author(s): Rajesh C. Junghare ; Vinayak Pachkawade ; Rajendra M. Patrikar
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2015
Conference Location: Ahmedabad, India
Conference Date: 26 June 2015
Page(s): 1 - 2
ISBN (CD): 978-1-4799-1742-6
ISBN (Electronic): 978-1-4799-1743-3
DOI: 10.1109/ISVDAT.2015.7208119
Regular:

This paper presents a 2.47 GHz capacitively transduced micromechanical disk resonator based on a Wine Glass mode of vibration. An ultra nano-crystalline diamond (UNCD) material has been used to... View More

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