IEEE - Institute of Electrical and Electronics Engineers, Inc. - Design and analysis of a touch mode MEMS capacitive pressure sensor for IUPC

2015 19th International Symposium on VLSI Design and Test (VDAT)

Author(s): Anil Sharma
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2015
Conference Location: Ahmedabad, India
Conference Date: 26 June 2015
Page(s): 1 - 6
ISBN (CD): 978-1-4799-1742-6
ISBN (Electronic): 978-1-4799-1743-3
DOI: 10.1109/ISVDAT.2015.7208106
Regular:

In this paper, a novel design of diaphragm based pressure sensor has been proposed, which may find its application in Intra Uterine Pressure Catheter (IUPC) system. The novelty of the device lies... View More

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