IEEE - Institute of Electrical and Electronics Engineers, Inc. - Semiconductor green fabrication innovative energy efficient design and operational optimization of chilled water system

2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

Author(s): J. S. Shyu ; L. K. Zhu ; Tarun Anandani ; Y. J. Wang ; H. W. Fung ; C. N. Chang
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 May 2015
Conference Location: Saratoga Springs, NY, USA
Conference Date: 3 May 2015
Page(s): 286 - 289
ISBN (Electronic): 978-1-4799-9930-9
DOI: 10.1109/ASMC.2015.7164496
Regular:

This study surpassed traditional energy-saving ideas to propose a multi-core concept implementation of an energy-saving optimization model. The model allowed systems to match the optimum status,... View More

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