IEEE - Institute of Electrical and Electronics Engineers, Inc. - Automatic metrology algorithm identification using Pattern Matching

2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

Author(s): Daniel S. Fischer ; Khaled Akid ; Dina Abdelhaliem ; Islam S. Abed ; Joe LeBritton ; Juli Opitz ; Nick Dragiewicz ; Christopher McGinty ; Erin Lavigne
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 May 2015
Conference Location: Saratoga Springs, NY, USA
Conference Date: 3 May 2015
Page(s): 124 - 129
ISBN (Electronic): 978-1-4799-9930-9
DOI: 10.1109/ASMC.2015.7164482
Regular:

The number of measurement points and their types are increasing with the increasing challenges of the new technology nodes. The industry is challenged to enhance and automate the current Design... View More

Advertisement