IEEE - Institute of Electrical and Electronics Engineers, Inc. - Design optimisation of silicon-based MEMS sensors dedicated to bioaerosols monitoring

2015 17th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)

Author(s): Brice Berthelot ; Emmanuelle Algre ; Stephane Moularat ; Enric Robine ; Evelyne Gehin
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 April 2015
Conference Location: Montpellier, France
Conference Date: 27 April 2015
Page(s): 1 - 5
ISBN (Electronic): 978-1-4799-8625-5
ISBN (Paper): 978-1-4799-8627-9
DOI: 10.1109/DTIP.2015.7161009
Regular:

Due to recent paradigm changes for the monitoring of air pollution, assessing human exposure to (bio)- aerosols with low-cost sensors is expected to be of growing importance. In this context, our... View More

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