IEEE - Institute of Electrical and Electronics Engineers, Inc. - New capacitive micro-acoustic resonators machined in single-crystal silicon stacked structures

2015 Joint Conference of the IEEE International Frequency Control Symposium & the European Frequency and Time Forum (FCS)

Author(s): Nesrine Belkadi ; Thomas Baron ; Bernard Dulmet ; Laurent Robert ; Etienne Herth ; Florent Bernard
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 April 2015
Conference Location: Denver, CO, USA
Conference Date: 12 April 2015
Page(s): 787 - 792
ISBN (CD): 978-1-4799-8865-5
ISBN (Electronic): 978-1-4799-8866-2
DOI: 10.1109/FCS.2015.7138959
Regular:

We present a new type of acoustic resonator technology aimed to undoing the technological locks encountered during the realization of capacitive silicon MEMS resonators exploiting true Bulk... View More

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