IEEE - Institute of Electrical and Electronics Engineers, Inc. - Third order intermodulation distortion in capacitive-gap transduced micromechanical filters

2015 Joint Conference of the IEEE International Frequency Control Symposium & the European Frequency and Time Forum (FCS)

Author(s): Jalal Naghsh Nilchi ; Ruonan Liu ; Scott Li ; Mehmet Akgul ; Tristan O. Rocheleau ; Clark T.-C Nguyen
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 April 2015
Conference Location: Denver, CO, USA
Conference Date: 12 April 2015
Page(s): 5 - 10
ISBN (CD): 978-1-4799-8865-5
ISBN (Electronic): 978-1-4799-8866-2
DOI: 10.1109/FCS.2015.7138782
Regular:

The third-order intermodulation distortion in properly terminated high-order bridged clamped-clamped beam (CC-beam) channel-select micromechanical filters has been measured for the first time and... View More

Advertisement