IEEE - Institute of Electrical and Electronics Engineers, Inc. - Design of a MEMS sensor for surgical handpiece

2008 International Conference on Microelectronics - ICM

Author(s): M. Mottaghi ; F. Ghalichi ; H.B. Ghavifekr
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 December 2008
Conference Location: Sharjah, United Arab Emirates
Conference Date: 14 December 2008
Page(s): 216 - 219
ISBN (CD): 978-1-4244-2370-5
ISBN (Paper): 978-1-4244-2369-9
DOI: 10.1109/ICM.2008.5393531
Regular:

This paper presents design and characterization of a MEMS comb accelerometer designated for integration into surgical probe to detect tissue hardness during cataract removal surgery. It helps the... View More

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