IEEE - Institute of Electrical and Electronics Engineers, Inc. - Finite element analysis of MEMS based Fabry-Perot optical filter with electrostatic actuation

2008 Asia Optical Fiber Communication & Optoelectronic Exposition & Conference (AOE)

Author(s): Lei Wei ; Xuyuan Chen
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 October 2008
Conference Location: Shanghai, China
Conference Date: 30 October 2008
Page(s): 1 - 3
ISBN (CD): 978-1-55752-863-6
Regular:

Mechanical properties and tuning ability of MEMS based Fabry-Perot optical filter with electrostatic actuation are investigated. The simulation results demonstrate that the fringing field... View More

Advertisement