IEEE - Institute of Electrical and Electronics Engineers, Inc. - Anchor limited Q in flexural mode resonators

2008 IEEE International Ultrasonics Symposium

Author(s): J.E.-Y. Lee ; J. Yan ; A.A. Seshia
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2008
Conference Location: Beijing, China
Conference Date: 2 November 2008
Page(s): 2,213 - 2,216
ISBN (CD): 978-1-4244-2480-1
ISBN (Paper): 978-1-4244-2428-3
DOI: 10.1109/ULTSYM.2008.0548
Regular:

This paper reports a preliminary examination of the effect of anchor geometry design on the quality factor of flexural mode resonators operating in vacuum using both FE simulation and measurements... View More

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