IEEE - Institute of Electrical and Electronics Engineers, Inc. - High-frequency piezoelectric PZT film micromachined ultrasonic arrays

2008 IEEE International Ultrasonics Symposium

Author(s): D.W. Wu ; Q.F. Zhou ; K.K. Shung ; C.G. Liu ; F.T. Djuth
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2008
Conference Location: Beijing, China
Conference Date: 2 November 2008
Page(s): 1,222 - 1,225
ISBN (CD): 978-1-4244-2480-1
ISBN (Paper): 978-1-4244-2428-3
DOI: 10.1109/ULTSYM.2008.0295
Regular:

This paper presents the latest development of high-frequency PZT film ultrasonic linear arrays. A PZT thick film of 22 mum in thickness was fabricated with a spin-coating method. The film was... View More

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