IEEE - Institute of Electrical and Electronics Engineers, Inc. - Single chip CMUT arrays with integrated CMOS electronics: Fabrication process development and experimental results

2008 IEEE International Ultrasonics Symposium

Author(s): J. Zahorian ; R. Guldiken ; G. Gurun ; M.S. Qureshi ; M. Balantekin ; P. Hasler ; F.L. Degertekin
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2008
Conference Location: Beijing, China
Conference Date: 2 November 2008
Page(s): 386 - 389
ISBN (CD): 978-1-4244-2480-1
ISBN (Paper): 978-1-4244-2428-3
DOI: 10.1109/ULTSYM.2008.0095
Regular:

One of the most important promises of capacitive micromachined ultrasonic transducer (CMUT) technology is integration with electronics. This approach maximizes transducer sensitivity by minimizing... View More

Advertisement