IEEE - Institute of Electrical and Electronics Engineers, Inc. - Fabrication and characterization of surface micromachined CMUT with a bossed membrane

2008 IEEE International Ultrasonics Symposium

Author(s): Mengli Wang ; Jingkuang Chen ; Xiaoyang Cheng ; Chuan Li ; Xueyuan Liu
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2008
Conference Location: Beijing, China
Conference Date: 2 November 2008
Page(s): 394 - 397
ISBN (CD): 978-1-4244-2480-1
ISBN (Paper): 978-1-4244-2428-3
DOI: 10.1109/ULTSYM.2008.0097
Regular:

This paper describes the fabrication and characterization of surface-micromachined capacitive ultrasonic transducers with a bossed membrane. The boss was formed using 3mum-thick deposited... View More

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