IEEE - Institute of Electrical and Electronics Engineers, Inc. - Piezoelectric MEMS for audio signal transduction, microfluidic management, resonant mass sensing, and movable surface micromachined structures

2008 IEEE International Ultrasonics Symposium

Author(s): Eun Sok Kim
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2008
Conference Location: Beijing, China
Conference Date: 2 November 2008
Page(s): 924 - 929
ISBN (CD): 978-1-4244-2480-1
ISBN (Paper): 978-1-4244-2428-3
DOI: 10.1109/ULTSYM.2008.0223
Regular:

This paper describes piezoelectric MEMS that offer competitive advantages over existing commercial technologies in audio, ultrasonic, air borne, microfluidic and RF applications. Specifically, a... View More

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