IEEE - Institute of Electrical and Electronics Engineers, Inc. - Surface acoustic wave devices on AlN/single-crystal diamond for high frequency and high performances operation

2008 IEEE International Ultrasonics Symposium

Author(s): M. Benetti ; D. Cannata ; F. Di Pietrantonio ; E. Verona ; S. Almaviva ; G. Prestopino ; C. Verona ; G. Verona-Rinati
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2008
Conference Location: Beijing, China
Conference Date: 2 November 2008
Page(s): 1,924 - 1,927
ISBN (CD): 978-1-4244-2480-1
ISBN (Paper): 978-1-4244-2428-3
DOI: 10.1109/ULTSYM.2008.0474
Regular:

In this paper we present recent results on fabrication of SAW devices on AlN/single-crystal diamond. The AlN thin film was deposited by sputtering technique, optimized to achieve an high degree of... View More

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