IEEE - Institute of Electrical and Electronics Engineers, Inc. - Fabrication of MEMS diaphragm transducer array based on epitaxial PZT thin film for 2-D hydrophone application

2008 IEEE International Ultrasonics Symposium

Author(s): N. Okada ; K. Higuchi ; K. Kobayashi ; M. Ito ; M. Takabe ; M. Otonari ; I. Kanja ; D. Akai ; K. Sawada ; M. Ishida
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2008
Conference Location: Beijing, China
Conference Date: 2 November 2008
Page(s): 1,781 - 1,784
ISBN (CD): 978-1-4244-2480-1
ISBN (Paper): 978-1-4244-2428-3
DOI: 10.1109/ULTSYM.2008.0437
Regular:

A piezoelectric ultrasonic hydrophone array was fabricated using diaphragm transducer on Si substrates. A two dimensional (2-D) array of 8 times 8 elements with diaphragm transducer has been... View More

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