IEEE - Institute of Electrical and Electronics Engineers, Inc. - Screen printed thick film based pMUT arrays

2008 IEEE International Ultrasonics Symposium

Author(s): T. Hedegaard ; T. Pedersen ; E.V. Thomsen ; R. Lou-Moeller ; K. Hansen ; T. Zawada
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2008
Conference Location: Beijing, China
Conference Date: 2 November 2008
Page(s): 2,126 - 2,129
ISBN (CD): 978-1-4244-2480-1
ISBN (Paper): 978-1-4244-2428-3
DOI: 10.1109/ULTSYM.2008.0526
Regular:

This article reports on the fabrication and characterization of lambda-pitched piezoelectric micromachined ultrasound transducer (pMUT) arrays fabricated using a unique process combining... View More

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