IEEE - Institute of Electrical and Electronics Engineers, Inc. - Spurious vibration suppression by film thickness control for FBAR

2008 IEEE International Ultrasonics Symposium

Author(s): S. Tanifuji ; Y. Aota ; H. Oguma ; S. Kameda ; T. Takagi ; K. Tsubouchi
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2008
Conference Location: Beijing, China
Conference Date: 2 November 2008
Page(s): 2,193 - 2,196
ISBN (CD): 978-1-4244-2480-1
ISBN (Paper): 978-1-4244-2428-3
DOI: 10.1109/ULTSYM.2008.0543
Regular:

We have successfully fabricated 5 GHz band FBAR using aluminium nitride (AlN) film by metal organic chemical vapor deposition (MOCVD) method on SiO2/Si substrate. However, large... View More

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