IEEE - Institute of Electrical and Electronics Engineers, Inc. - Lateral field excitation of well structures in quartz

2008 IEEE International Ultrasonics Symposium

Author(s): S. Winters ; G. Bernhardt ; D.J. Frankel ; J. Vetelino
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2008
Conference Location: Beijing, China
Conference Date: 2 November 2008
Page(s): 272 - 275
ISBN (CD): 978-1-4244-2480-1
ISBN (Paper): 978-1-4244-2428-3
DOI: 10.1109/ULTSYM.2008.0067
Regular:

Recently, there has been interest in the fabrication of multiple Quartz Crystal Microbalances (QCMs) on a single substrate, to create a sensor array. The QCM's are ldquowell structuresrdquo etched... View More

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