IEEE - Institute of Electrical and Electronics Engineers, Inc. - BAW resonators based on AlN with Ir electrodes for digital wireless transmissions

2008 IEEE International Ultrasonics Symposium

Author(s): E. Iborra ; M. Clement ; J. Olivares ; S. Gonzalez-Castilla ; J. Sangrador ; N. Rimmer ; A. Rastogi ; B. Ivira ; A. Reinhardt
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2008
Conference Location: Beijing, China
Conference Date: 2 November 2008
Page(s): 2,189 - 2,192
ISBN (CD): 978-1-4244-2480-1
ISBN (Paper): 978-1-4244-2428-3
DOI: 10.1109/ULTSYM.2008.0542
Regular:

We investigate the performance of aluminum nitride (AlN)-based solidly mounted resonators (SMR) made with iridium (Ir) electrodes for applications in WCDMA filters. Ir/AlN/Ir stacks are grown on... View More

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