IEEE - Institute of Electrical and Electronics Engineers, Inc. - Curvilinear capacitive micromachined ultrasonic transducer (CMUT) array fabricated using a reverse process

2008 IEEE International Ultrasonics Symposium

Author(s): A. Caronti ; A. Coppa ; A. Savoia ; C. Longo ; P. Gatta ; B. Mauti ; A. Corbo ; B. Calabrese ; G. Bollino ; A. Paz ; G. Caliano ; M. Pappalardo
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2008
Conference Location: Beijing, China
Conference Date: 2 November 2008
Page(s): 2,092 - 2,095
ISBN (CD): 978-1-4244-2480-1
ISBN (Paper): 978-1-4244-2428-3
DOI: 10.1109/ULTSYM.2008.0517
Regular:

This paper presents the manufacturing of a flexible 192-elements curvilinear CMUT array developed using our patented reverse fabrication process. In this process the silicon nitride CMUT membranes... View More

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