IEEE - Institute of Electrical and Electronics Engineers, Inc. - Fabrication of SHF range SAW devices on AlN/Diamond-substrate

2008 IEEE International Ultrasonics Symposium

Author(s): T. Omori ; A. Kobayashi ; Y. Takagi ; K.-y. Hashimoto ; M. Yamaguchi
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2008
Conference Location: Beijing, China
Conference Date: 2 November 2008
Page(s): 196 - 200
ISBN (CD): 978-1-4244-2480-1
ISBN (Paper): 978-1-4244-2428-3
DOI: 10.1109/ULTSYM.2008.0048
Regular:

Preparation of piezoelectric AlN thin films on diamond substrates, and their application to SHF SAW devices are discussed. It is confirmed that DC-TFTS method enable to prepare highly c-axis... View More

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