IEEE - Institute of Electrical and Electronics Engineers, Inc. - Frequency response of a micromachined doubly-clamped vibrating beam for the measurement of liquid properties

2008 IEEE International Ultrasonics Symposium

Author(s): C. Riesch ; F. Keplinger ; E.K. Reichel ; B. Jakoby
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2008
Conference Location: Beijing, China
Conference Date: 2 November 2008
Page(s): 1,022 - 1,025
ISBN (CD): 978-1-4244-2480-1
ISBN (Paper): 978-1-4244-2428-3
DOI: 10.1109/ULTSYM.2008.0247
Regular:

We recently presented a micromachined doubly clamped vibrating beam sensor for measuring viscosity and density of liquids. The beam vibrations are excited by Lorentz forces arising from a... View More

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