IEEE - Institute of Electrical and Electronics Engineers, Inc. - Finite Element Analysis of Alternating Phase-Shift Masks Subjected to Dynamic Pressure Loading Due to Megasonic Cleaning

2008 10th Electronics Packaging Technology Conference (EPTC 2008)

Author(s): X. Yin ; K. Komvopoulos
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 December 2008
Conference Location: Singapore, Singapore
Conference Date: 9 December 2008
Page(s): 435 - 443
ISBN (CD): 978-1-4244-2118-3
ISBN (Paper): 978-1-4244-2117-6
DOI: 10.1109/EPTC.2008.4763473
Regular:

The mechanical response of alternating phase-shift mask (APSM) microstructures to dynamic pressure loading during megasonic cleaning was analyzed with the finite element method (FEM). A parametric... View More

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