IEEE - Institute of Electrical and Electronics Engineers, Inc. - A vertically supported ring-type mems gyroscope utilizing electromagnetic actuation and sensing

2008 IEEE International Conference on Electron Devices and Solid-State Circuits

Author(s): C.N. Yeh ; J.J. Tsai ; R.J. Shieh ; F.G. Tseng ; C.J. Li ; Y.C. Su
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 December 2008
Conference Location: Hong Kong, China
Conference Date: 8 December 2008
Page(s): 1 - 4
ISBN (CD): 978-1-4244-2540-2
ISBN (Paper): 978-1-4244-2539-6
DOI: 10.1109/EDSSC.2008.4760713
Regular:

In this paper, we present the design and fabrication of a ring-type MEMS gyroscope, which is composed of a soft polymer-structure and 8 separate driving and sensing coils. The bottom side of the... View More

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