IEEE - Institute of Electrical and Electronics Engineers, Inc. - Resonant MEMS sensors for detection of aqueous heavy metal ions with Sub-ppm resolution

2008 IEEE International Conference on Electron Devices and Solid-State Circuits

Author(s): A. Rahafrooz ; S. Pourkamali
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 December 2008
Conference Location: Hong Kong, China
Conference Date: 8 December 2008
Page(s): 1 - 4
ISBN (CD): 978-1-4244-2540-2
ISBN (Paper): 978-1-4244-2539-6
DOI: 10.1109/EDSSC.2008.4760702
Regular:

This work presents a new approach for detection of trace amounts of heavy metal ions in water samples using capacitive silicon resonators as ultra-sensitive mass sensors. This approach is based on... View More

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