IEEE - Institute of Electrical and Electronics Engineers, Inc. - Design and Performance of a Microactuator with Multi Degrees of Freedom

2008 International Symposium on Micro-NanoMechatronics and Human Science

Author(s): A. Torii ; M. Banno ; T. Tanahashi ; A. Ueda ; K. Doki
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2008
Conference Location: Nagoya, Japan
Conference Date: 6 November 2008
Page(s): 507 - 512
ISBN (CD): 978-1-4244-2919-6
ISBN (Paper): 978-1-4244-2918-9
DOI: 10.1109/MHS.2008.4752505
Regular:

We describe the design and performance of a microactuator with six degrees of freedom (DOF). The six DOF motion is realized by using six piezo elements and three electromagnets. The microactuator... View More

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