IEEE - Institute of Electrical and Electronics Engineers, Inc. - Design and Simulation of Piezoresistive Micro Accelerometers for Wearable Sensing Applications

2008 International Symposium on Micro-NanoMechatronics and Human Science

Author(s): R. Amarasinghe ; K. Inaba ; V.T. Dau ; D.V. Dao ; S. Sugiyama
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2008
Conference Location: Nagoya, Japan
Conference Date: 6 November 2008
Page(s): 37 - 41
ISBN (CD): 978-1-4244-2919-6
ISBN (Paper): 978-1-4244-2918-9
DOI: 10.1109/MHS.2008.4752419
Regular:

This paper presents the modeling and simulation of new structure for solid-state three degrees of freedom (3-DOF) micro accelerometer utilizing piezoresistive effect in single crystal Si. The... View More

Advertisement