IEEE - Institute of Electrical and Electronics Engineers, Inc. - Design and Simulation of Convective Inertial Sensor

2008 International Symposium on Micro-NanoMechatronics and Human Science

Author(s): Van Thanh Dau ; Thien Xuan Dinh ; Dzung Viet Dao ; Ranjith Amarashinge ; Bui Thanh Tung ; Sugiyama Susumu
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2008
Conference Location: Nagoya, Japan
Conference Date: 6 November 2008
Page(s): 33 - 36
ISBN (CD): 978-1-4244-2919-6
ISBN (Paper): 978-1-4244-2918-9
DOI: 10.1109/MHS.2008.4752418
Regular:

This paper reports the design and simulation of a MEMS convective inertial sensor, which integrates a new three-axis gyroscope and four single-axis accelerometers. The device can independently... View More

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