IEEE - Institute of Electrical and Electronics Engineers, Inc. - The Electrical Performance Analysis of Piezoelectric Micromachine Ultrasound Transducer for Audio Directional Loudspeaker

2008 International Conference on Computer and Electrical Engineering (ICCEE)

Author(s): Ying Zhang ; Limei Xu ; Jiaqi Gu ; Hong Hu
Sponsor(s): Int. Assoc. Comput. Sci. Inf. Technol.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 December 2008
Conference Location: Phuket, Thailand
Conference Date: 20 December 2008
Page(s): 812 - 816
ISBN (Paper): 978-0-7695-3504-3
DOI: 10.1109/ICCEE.2008.43
Regular:

This paper presents a novel piezoelectric micromachine ultrasound transducer (pMUT), consisted Pb(Zr,Ti)O3 (PZT) film on silicon membrane. The proposed micro-transducer is applied in an audio beam... View More

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