IEEE - Institute of Electrical and Electronics Engineers, Inc. - A simple and ultra-low power capacitive pressure micro-sensor sensing system design

APCCAS 2008 - 2008 IEEE Asia Pacific Conference on Circuits and Systems (APCCAS)

Author(s): Ya-Hsin Hsueh ; Jeng-Hsien Lin ; Meng-Kai Su
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2008
Conference Location: Macao, China
Conference Date: 30 November 2008
Page(s): 82 - 85
ISBN (Paper): 978-1-4244-2341-5
ISBN (Online): 978-1-4244-2342-2
DOI: 10.1109/APCCAS.2008.4745965
Regular:

The aim of this paper is design and fabrication of a novel fully integrated capacitive pressure sensor that can be detected pressure for airtight structure of industrial and biomedical... View More

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