IEEE - Institute of Electrical and Electronics Engineers, Inc. - Fabrication of a two-dimensional photonic crystals using reactive ion etching

2008 11th IEEE Singapore International Conference on Communication Systems (ICCS)

Author(s): Jingtao Zhou ; Huajun Shen ; Huihui Zhang ; Xinyu Liu
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2008
Conference Location: Guangzhou, China
Conference Date: 19 November 2008
Page(s): 1,231 - 1,234
ISBN (CD): 978-1-4244-2424-5
ISBN (Paper): 978-1-4244-2423-8
DOI: 10.1109/ICCS.2008.4737379
Regular:

A triangular lattice photonic crystals with lattice constant 500 nm and the diameter 300 nm of air pores in the silicon-on-insulator (SOI) substrate have been designed, fabricated and... View More

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