IEEE - Institute of Electrical and Electronics Engineers, Inc. - A new design based on electro-thermally actuation for an SU-8 microgripper

2008 International Semiconductor Conference

Author(s): R. Voicu ; R. Muller ; L. Eftime
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 October 2008
Conference Location: Sinaia, Romania
Conference Date: 13 October 2008
Volume: 1
Page(s): 205 - 208
ISBN (Paper): 978-1-4244-2004-9
ISSN (Paper): 1545-827X
DOI: 10.1109/SMICND.2008.4703369
Regular:

A new design for a polymeric microgripper was developed. Two microgripper with different dimensions were considered. An evaluation between these models was performed using the simulation results.... View More

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