IEEE - Institute of Electrical and Electronics Engineers, Inc. - EH004

2008 17th IEEE International Symposium on the Applications of Ferroelectrics (ISAF)

Author(s): Dong-Joo Kim ; Dongna Shen ; Jung-Hyun Park ; Jyoti Ajitsaria ; Song-Yul Choe
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 February 2008
Conference Location: Santa Re, NM, USA, USA
Conference Date: 23 February 2008
Volume: 1
Page(s): 1 - 4
ISBN (CD): 978-1-4244-2745-1
ISBN (Paper): 978-1-4244-2744-4
ISSN (Electronic): 2375-0448
ISSN (Paper): 1099-4734
DOI: 10.1109/ISAF.2008.4693939
Regular:

A MEMS piezoelectric power harvesting device, a unimorph PZT cantilever and arrays with an integrated Si proof mass was designed. Pt/PZT/Pt/Ti/SiO2 multilayered films were deposited on... View More

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