IEEE - Institute of Electrical and Electronics Engineers, Inc. - Polysilicon vertical actuator powered with waste heat

2008 IEEE Custom Integrated Circuits Conference - CICC 2008

Author(s): J. Varona ; M. Tecpoyotl-Torres ; A.A. Hamoui
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 September 2008
Conference Location: San Jose, CA, USA
Conference Date: 21 September 2008
Page(s): 519 - 522
ISBN (CD): 978-1-4244-2019-3
ISBN (Paper): 978-1-4244-2018-6
DOI: 10.1109/CICC.2008.4672136
Regular:

This paper presents a new micro thermal actuator with bi-directional vertical motion. Traditional thermal actuators require an electric current to generate heat by Joule effect and obtain motion... View More

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