IEEE - Institute of Electrical and Electronics Engineers, Inc. - Semiconductor manufacturing equipment data acquisition simulation for timing performance analysis

2008 IEEE International Symposium on Precision Clock Synchronization for Measurement, Control and Communication

Author(s): Ya-Shian Li-Baboud ; Xiao Zhu ; D. Anand ; S. Hussaini ; J. Moyne
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 September 2008
Conference Location: Ann Arbor, MI, USA
Conference Date: 22 September 2008
Page(s): 77 - 82
ISBN (CD): 978-1-4244-2275-3
ISBN (Paper): 978-1-4244-2274-6
DOI: 10.1109/ISPCS.2008.4659217
Regular:

The ability to acquire quality equipment and process data is important for future real-time process control systems to maximize opportunities for semiconductor manufacturing yield enhancement and... View More

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