IEEE - Institute of Electrical and Electronics Engineers, Inc. - A micromachined airflow sensor based on RF evanescent-mode cavity resonator

2008 IEEE MTT-S International Microwave Symposium Digest - MTT 2008

Author(s): Yanzhu Zhao ; Seong-Hyok Kim ; Yuan Li ; Bo Pan ; Xiaosong Wu ; Manos Tentzeris ; John Parapolymerou ; Mark G. Allen
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2008
Conference Location: Atlanta, GA, USA, USA
Conference Date: 15 June 2008
Page(s): 1,199 - 1,202
ISBN (CD): 978-1-4244-1781-0
ISBN (Paper): 978-1-4244-1780-3
ISSN (Paper): 0149-645X
DOI: 10.1109/MWSYM.2008.4633273
Regular:

This paper presents an RF airflow sensor based on an evanescent-mode cavity resonator. The frequency loading is achieved by a capacitive post in the center of a cylinder cavity. As a sensing... View More

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