IEEE - Institute of Electrical and Electronics Engineers, Inc. - Solid state: Integrated circuits: The case for gallium arsenide: This superfast semiconductor holds great promise for high-speed computers, and manufacturing difficulties are now beginning to be overcome

Author(s): R. C. Eden ; A. R. Livingston ; B. M. Welch
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 December 1983
Volume: 20
Page(s): 30 - 37
ISSN (Paper): 0018-9235
DOI: 10.1109/MSPEC.1983.6370057
Regular:

A discussion is presented of fabrication technologies for manufacturing GaAs devices. Advantages and drawbacks of heterojunction devices are outlined. Areas of concern in GaAs production lines are... View More

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