IEEE - Institute of Electrical and Electronics Engineers, Inc. - Electron-beam programmable 128K-bit wafer-scale EPROM

Author(s): D.C. Shaver ; R.W. Mountain ; D.J. Silversmith
Sponsor(s): IEEE Electron Devices Society
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 May 1983
Volume: 4
Page(s): 153 - 155
ISSN (Paper): 0741-3106
ISSN (Online): 1558-0563
DOI: 10.1109/EDL.1983.25684
Regular:

The feasibility of using an electron beam to customize and repair a wafer-scale n MOS system has been demonstrated. As the test vehicle, a 128K-bit EPROM was fabricated. All data bits and address... View More

Advertisement